Illumination system, particularly for EUV lithography

ABSTRACT

The invention concerns an illumination system for wavelengths (193 nm, particularly for EUV lithography with at least one light source, which has an illumination A in one surface; 
     at least one device for producing secondary light sources; 
     at least one mirror or lens device, comprising at least one mirror or one lens, which is (are) divided into raster elements; one or more optical elements, which are arranged between the mirror or lens device that comprises at least one mirror or one lens, which is (are) divided into raster elements, and the reticle plane, wherein the optical elements image the secondary light sources in the exit pupil of the illumination system. 
     The illumination system is characterized by the fact that the light source is a light source for producing radiation with a wavelength ≦193 nm, which irradiates in a well-defined plane with a wavelength spectrum, wherein the range of wavelengths used for the application, particularly for lithography, has a beam divergence perpendicular to this plane that is smaller than 5 mrads.

This is a Continuation of PCT Application Ser. No. PCT/EP99/02999, filed May 4, 1999, which claims priorities of German Application No. 198 19 898.1, filed May 5, 1998, German Application No. 199 03 807.4, filed Feb. 2, 1999, and German Application No. 299 02 108.4, filed Feb. 8, 1999.

The invention concerns an illumination system according to the preamble of claim 1 as well as a projection exposure device with such an illumination system and a process for the production of microelectronic components with a projection exposure device.

BACKGROUND OF THE INVENTION

In order to still further reduce the structural widths for electronic components, particularly in the submicron range, it is necessary to reduce the wavelength of the light utilized for microlithography. Lithography with soft x-rays, so-called EUV lithography, is conceivable at wavelengths below 193 nm for example.

An illumination system suitable for EUV lithography will homogeneously, i.e., uniformly illuminate, with as few reflections as possible, a predetermined field for EUV lithography, particularly the annular field of an objective. Furthermore, the pupil of the objective should be illuminated up to a specific degree of filling, independent of the field, and the exit pupil of the illumination system should lie in the entrance pupil of the objective.

An illumination system for a lithography device, which uses EUV radiation, has been made known from U.S. Pat. No. 5,339,246. For uniform illumination in the reticle plane and filling of the pupil, U.S. Pat. No. 5,339,246 proposes a condenser, which is constructed as a collector lens, and comprises at least four pairs of mirror facets, which are arranged symmetrically. A plasma light source is used as the light source.

An illumination system with a plasma light source comprising a condenser mirror is shown in U.S. Pat. No. 5,737,137, in which an illumination of a mask or a reticle to be illuminated is achieved by means of spherical mirrors.

U.S. Pat. No. 5,361,292 shows an illumination system, in which a plasma light source is provided and the point plasma light source is imaged by means of a condenser, which has at least three aspherical mirrors arranged off-center, in a ring-shaped illuminated surface. The ring-shaped illuminated surface is then imaged in the entrance pupil by means of a special sequence of grazing-incidence mirrors.

An illumination system has been made known from U.S. Pat. No. 5,581,605, in which a photon beam is spilt into a multiple number of secondary light sources by means of a plate with raster elements. A homogeneous or uniform illumination is achieved in this way in the reticle plane. The imaging of the reticle on the wafer to be exposed is produced by means of a conventional reducing optics. A gridded mirror with equally curved elements is provided precisely in the illuminating beam path.

U.S. Pat. No. 5,677,939 shows an illumination system for EUV illumination devices, in which an annular field is homogeneously illuminated. In the EUV illumination system according to U.S. Pat. No. 5,677,939, the beams emitted from the EUV source are formed into a parallel beam of light, for example, by means of a mirror. In order to form a multiple number of secondary light sources, the parallel beam of light is guided onto a mirror with a plurality of cylinder raster elements. U.S. Pat. No. 5,677,939 also describes the use of synchrotron radiation sources, but of course, the light of the source is guided directly onto the mirror with cylinder raster elements, due to the parallel nature of the emitted synchrotron radiation, without optical elements situated therebetween. All embodiments shown in U.S. Pat. No. 5,677,939 operate in a parallel beam path. In addition, the facetted mirrors known from U.S. Pat. No. 5,677,939 contain facets with an optical effect and are arranged on a planar substrate.

From U.S. Pat. No. 5,512,759 for an arc shaped-field projection system with a synchrotron radiation source an illumination system has been made known, which comprises a condenser system with a multiple number of convergent mirrors. The mirrors collect the radiation emitted by the synchrotron radiation source, to form an annular light beam, which corresponds to the annular field to be illuminated. Therefore, the annular field is illuminated very uniformly. The synchrotron radiation source has a beam divergence >100 mrads in the beam plane.

U.S. Pat. No. 5,439,781 shows an illumination system with a synchrotron radiation source, in which the waveguide value, i.e., the Lagrange optical invariant, is adjusted by means of a scatter disk in the entrance pupil of the objective, whereby the scatter disk may have a plurality of pyramidal structures. The synchrotron radiation source in the case of U.S. Pat. No. 5,439,781 also has a beam divergence >100 mrads. The collector mirror for collecting the synchrotron radiation and bundling the same may itself be constructed with facets.

The disclosure content of all of the previously named documents:

U.S. Pat. No. 5,339,246

U.S. Pat. No. 5,737,137

U.S. Pat. No. 5,361,292

U.S. Pat. No. 5,581,605

U.S. Pat. No. 5,677,939

U.S. Pat. No. 5,512,759

U.S. Pat. No. 5,439,781

is incorporated in the present application by reference.

SUMMARY OF THE INVENTION

An object of the invention is to provide an illumination system that is constructed as simply as possible fulfilling the requirements for an exposure system for wavelengths ≦193 nm, particularly in the EUV region and a process for the design of such a system. In addition to a uniform illumination of the reticle, also the telecentric requirements of a system for wavelengths ≦193 nm particularly should be fulfilled.

Telecentricity is to be understood in the present application in that the entire system is telecentric at the wafer. This requires an adaptation of the exit pupil of the illumination system to the entrance pupil of the objective, which is finite for a reflective reticle.

In the present application, the telecentricity requirement is fulfilled, if the divergence of the principal beams of the illumination system and objective in the reticle plane does not exceed a predetermined value, for example, ±4.0 mrads, preferably ±1.0 mrad, and the principal beams impinge on the wafer telecentrically.

According to the invention, this object is achieved in that for the above-described illumination system, the light source is a light source for producing radiation with a wavelength ≦193 nm, which irradiates with a wavelength spectrum in a predetermined plane, wherein the radiation in the wavelength range that can be used for applications, particularly lithography, has a beam divergence perpendicular to the predetermined plane, which is less than 5 mrads.

Synchrotron radiation sources are used in the EUV region as preferred light sources, with a beam divergence smaller than 5 mrads in the plane perpendicular to the predetermined plane. Synchrotron radiation is emitted, if relativistic electrons are deflected in a magnetic field. The synchrotron radiation is emitted tangentially to the path of the electrons.

At the present time, one can distinguish three types of sources in the case of synchrotron radiation sources:

bending magnets

wigglers

undulators.

In bending-magnet sources, electrons are deflected by a bending magnet and photon radiation is emitted.

Wiggler sources contain a so-called wiggler for deflection of the electron or an electron beam, the wiggler comprising many pairs of magnets with alternating polarity arranged in rows. When an electron passes through a wiggler, the electron will be subjected to a periodic, vertical magnetic field; the electron oscillates accordingly in the horizontal plane. Furthermore, wigglers are characterized in that no coherence effects occur. The synchrotron radiation produced by means of a wiggler is similar to that of a bending magnet and radiates in a horizontal solid angle. In contrast to the bending magnet, it has a flux that is amplified by the number of poles of the wiggler.

There is no clear dividing line between wiggler sources and undulator sources.

In the case of undulator sources, the electrons in the undulator are subjected to a magnetic field with shorter period and a magnetic field of the deflection poles being smaller than in the case of the wiggler, so that interference effects occur in the synchrotron radiation. Due to the interference effects, the synchrotron radiation has a discontinuous spectrum and is emitted both horizontally as well as vertically in a small solid-angle element; i.e., the radiation is highly directional.

With suitable dimensioning all above-mentioned synchrotron EUV radiation sources, provide EUV radiation, for example, of 13 or 11 nm with sufficient power for EUV lithography.

Concerning synchrotron radiation, reference is made to Ernst Eckhart Koch, “Handbook of Synchrotron Radiation”, 1983, Elsevier-Science, New York, the disclosure of this publication is included herein by reference.

Since the radiation sources according to the invention are characterized by a beam divergence that is smaller than 5 mrads, at least in one plane, advantageously the system comprises means for broadening the beam, for example, a collector system.

In an advantageous embodiment, diverging mirrors or scanning mirrors, which are moved for illuminating a surface can be provided as means for broadening a beam.

Since field and aperture of the light source are insufficient for filling or illuminating field and aperture in the reticle plane, the illumination system according to the invention contains at least one mirror or lens with raster elements for producing a plurality of secondary light sources, which are distributed uniformly in the diaphragm plane. Since the geometric dimensions of the raster elements of the first mirror or of the first lens determines the form of the illuminated field in the reticle plane, field raster elements are formed preferably in an rectangular shape in the case of an arc-shaped scanning slit. The raster elements of the first mirror, which are also designated as field raster elements, are designed in such a way that their optical effect is to form an image of the light source in the diaphragm plane, so-called secondary light source. If the extension of the light source is small, for example, approximately point-like, as in the case of an undulator source, then the extension of the secondary light source is also small, and all light beams approximately pass through one point. In each plane after the diaphragm plane then an image of the field raster elements is formed, whereby the magnification is given by the ratio of the distance diaphragm-reticle to the distance field raster element-diaphragm. The raster elements are tilted in such a way that the images of the field raster elements are superimposed at least partially in the reticle plane.

The secondary light sources are advantageously imaged into the entrance pupil of the objective with a field mirror or a field lens, whereby the field lens or field mirror forms the arc-shaped field by controlling the distortion. The magnification of the field raster element imaging is not modified thereby.

In the case of extended light sources, as, for example in case of a bending magnet, the secondary light sources are extended; therefore the images of the field raster elements in the reticle plane are not sharp. A sharp image can be achieved in such a system, if one provides a second mirror or lens with raster elements, i.e., a so-called double facetting, wherein the raster elements of the second mirror or lens, the so-called pupil raster elements, are located on the site of the secondary light sources.

In systems with two mirrors with raster elements, the form of the raster elements of the second mirror, i.e., the pupil raster elements, is adapted to the shape of the secondary light sources and thus differs from the form of the first raster elements, i.e., the field raster elements. It is particularly preferred if the pupil raster elements are round, if the light source is also round in shape.

It is particularly preferred that the first mirror with raster elements is illuminated in a round manner or rotation-symmetrically, since then a uniform distribution of the secondary light sources in the diaphragm plane can be achieved with an appropriate distribution.

If the illumination of the first mirror is not round, but, for example, rectangular, then the desired round illumination of the entrance pupil of the objective is achieved by double facetting such a system.

The optical elements situated after the mirrors with raster elements serve for imaging the diaphragm plane of the illumination system in the entrance pupil of the projection objective and to form the arc-shaped field. Further, they serve for forming the illumination distribution according to the requirements of the exposure process.

It is particularly preferred, that the optical elements comprise grazing-incidence mirrors with an angle of incidence ≦20°. In order to minimize the light losses associated with each reflection, it is advantageous if the number of field mirrors its kept small. Embodiments with at most two field mirrors are particularly preferred.

A numerical example will be given below, from which it is obvious that increasing the waveguide value, i.e. the Lagrange optical invariant, for example, in the case of an undulator source is necessary.

If one requires an aperture in the wafer plane of NA_(wafer)=0.1-0.25, then this means an aperture in the reticle plane of NA_(reticle)=0.025-0.0625 in the case of 4:1 systems. If the illumination system will illuminate this aperture homogeneously and independently of the field up to a filling degree of σ=0.6, then the EUV source must make available the following 2-dim waveguide value (LLW), i.e., the Lagrange optical invariant or etendu.

LLW_(illumination)=σ²LLW_(obj)=0.149 mm²−0.928 mm².

The waveguide value LLW, i.e., the Lagrange optical invariant, is defined generally as follows:

LLW=x·y·NA²+A·NA²,

whereby A is the illuminated surface. In the reticle plane, A amounts to, e.g., 110 mm×6 mm.

An undulator source will be considered as a light source for the EUV illumination system according to the invention, in a first form of embodiment.

The waveguide value, i.e., the Lagrange optical invariant or etendu, for the undulator source, can be estimated according to a simplified model, assuming a homogeneous surface radiator with diameter

ø=1.0 mm and aperture NA_(undulator)=0.001 with

LLW=A·NA² $\begin{matrix} {A_{undulator} = \quad {\pi \cdot \left( {/2} \right)^{2}}} \\ {= \quad {0.7850\quad {mm}^{2}}} \\ {{NA}_{undulator} = \quad 0.001} \end{matrix}$

so that

LLW_(undulator)=A·NA²=0.00000079 mm²=7.9e−07 mm².

As can be seen from this rough estimation, the waveguide value of the undulator source is disappearingly small in comparison to the required waveguide value.

The waveguide value, i.e., the Lagrange optical invariant, can be increased by providing distributed secondary light sources to the necessary amount in the entrance pupil of the objective. For this purpose, the first mirror is designed with raster elements. The illumination of the entrance pupil of an objective is defined by the filling factor. The following applies: ${{Filling}\quad {factor}\text{:}\quad \sigma} = \frac{r_{illumination}}{R_{{objective}\quad {aperture}}}$

wherein R_(objective aperture) is the radius of the entrance pupil of the objective, and

r_(illumination) is the radius of illumination of the field raster element plate in the case of annular illumination.

With σ=1.0, the entrance pupil is completely filled; σ=0.6 corresponds to an underfilling.

Since the partial pupils have sharp intensity peaks due to the small waveguide value of the undulator source, it is advantageous if these are smeared by means of “wobbling” field mirrors, whereby the-field illumination should remain unaffected. Thus, it is advantageous to introduce a wobbling field mirror as close as possible to the reticle plane.

An estimation for the angular region to be varied by the wobbling field mirror or by the periodically moving field mirror will be given below. If one assumes for the aperture in the reticle plane NA_(ret)=0.025 and the distance of the partial pupils amounts to approximately 0.005 for ΔNA, due to the parceling, then the angular region to be varied should fie in the order of magnitude of approximately ±2.5 mrads. An example of a wobbling field mirror would be a toroidal mirror with a size of 160×170 mm as well as a local dynamic gradient of ±2 mrads in the x and y directions with a stability of ±0.1 mrad.

A smearing can be achieved not only by means of movable so-called wobbling field mirrors, but also by dynamic deformation of the mirror surface.

In order to achieve a high scanning uniformity, the use of active lenses or mirrors for the optical elements can be advantageous.

Since the manufacture of field raster elements with a high aspect ratio of 20:1, for example, is difficult, in order to reduce the aspect ratio of field raster elements, it can be of advantage that these raster elements are of astigmatic shape. The secondary light sources are thus broken down into tangential and sagittal secondary sources, which lie in the tangential and sagittal diaphragm planes.

Whereas the system for wavelengths in the EUV region, as described above, is designed purely reflectively, i.e., exclusively with mirror components, a use is also conceivable for 193-nm or 157-nm systems. In such a case, refractive components such as lenses are used.

The systems described herein are particularly of interest for 193-nm or 157-nm systems, because they use only a few optical components and the optical elements have high absorptions at these wavelengths.

Advantageous configurations of the invention are the subject of the subclaims.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be described below for example on the basis of the drawings.

These show:

FIG. 1: principal diagram of the beam path of a system with two raster element plates;

FIGS. 2A-2B: Imaging of field and pupil for the central pairs of raster elements;

FIG. 3: path of the light beam for a rectangular field raster element in combination with a rectangular pupil raster element;

FIG. 4: Beam path according to FIG. 3 with field lens introduced in the beam path;

FIG. 5: Beam path according to FIG. 3 with two field lenses introduced Into the beam path;

FIG. 6: principle diagram of a refractive system with field and pupil raster elements;

FIGS. 7-14: different arrangements of field raster elements on a field-raster element plate;

FIGS. 15-17 raster of secondary light sources in the entrance pupil of the objective;

FIGS. 18-20: relationship between illuminated surfaces of field raster element plate and pupil raster element plate as well as structural length and aperture in the reticle plane;

FIGS. 21A-21B: a first embodiment of an illumination system with an undulator light source (type A) in refractive presentation;

FIGS. 22A-22B: a second embodiment of an illumination system with an undulator light source (type B) in refractive presentation;

FIGS. 23A-23B: a third embodiment of an illumination system with an undulator light source (type C) in refractive presentation;

FIG. 24: principal arrangement of a type A illumination system in reflective presentation;

FIG. 25: arrangement of the raster elements on the first facetted mirror;

FIGS. 26-29: a configuration of a type A illumination system;

FIGS. 30-33 illumination, intensity distribution, scanning energy and pupil illumination of a system according to FIGS. 26-29;

FIGS. 34-37: a configuration of a type B illumination system;

FIGS. 38-41: illumination, intensity distribution, scanning energy and pupil illumination of a system according to FIGS. 34-37;

FIGS. 42-43: principal arrangement of a type C1 illumination system in reflective presentation;

FIG. 44: principal arrangement of a type C2 illumination system in reflective presentation;

FIGS. 45-50: a configuration of a type C1 illumination system;

FIGS. 51-54: illumination, intensity distribution, scanning energy and pupil illumination of a system according to FIGS. 45 to 50;

FIGS. 55A-55B: a configuration of the invention with virtual diaphragm plane.

DESCRIPTION OF THE INVENTION

It shall first be shown theoretically on the basis of FIGS. 1-20 how a system can be provided, which satisfies the requirements with respect to uniformity and telecentricity for any desired illumination distribution A in a plane with an illumination device according to the invention. The system shown is a system with field-raster element and pupil raster element plates.

A principal diagram of the beam path of a refractive system with two raster element plates is illustrated in FIG. 1. The light from source 1 is collected by a collector lens 3 and transformed into a parallel or convergent light beam. Field raster elements 5 of the first raster element plate 7 decompose the light pencil and produce secondary light sources at the site of pupil raster elements 9. The field lens 12 images these secondary light sources in the exit pupil of the illumination system or the entrance pupil of the subsequent objective. Such an arrangement is characterized by an interlinked beam path of the field and pupil planes from the source up to the entrance pupil of the objective. For this the designation “Kohler illumination” is often selected, as defined, for example, in U.S. Pat. No. 5,677,939, whose disclosure is incorporated to the full extent in the present application by reference.

The illumination system according to FIG. 1 will be considered segmentally below. Since the intersection of the light intensity and aperture distribution lies in the plane of the field raster elements, the system can be evaluated independently of the type of source and the collector mirror.

The field and pupil projection for the central pair of raster elements 20, 22 is shown in FIGS. 2A and 2B. The field raster element 20 is imaged on reticle 14 or the mask to be imaged by means of pupil raster element 22 and field lens 12. The geometric extension of field raster element 20 determines the shape of the illuminated field in reticle plane 14. The image scale is approximately given by the ratio of the distance between pupil raster element 22 and reticle 14 and the distance between field raster element 20 and pupil raster element 22. The optical effect of field raster element 20 is to form an image of light source 1, a secondary light source, at the site of pupil raster element 22. If the extension of the light source is small, for example, approximately point-like, then all light rays run through the centers of the pupil raster elements 22. In such a case, an illumination device can be produced, in which the pupil raster elements are dispensed with.

As shown in FIG. 2B, the task of the field lens 12 consists of imaging the secondary I light sources in the entrance pupil 26 of an objective 24. If a field lens is introduced into the beam path, then the field imaging can be influenced in such a way that the image of the field raster elements is deformed by the control of the distortion. It is possible to deform a rectangle into a ring segment. The image scale of the field raster element projection is thus not changed.

The beam path of the light rays is shown in FIG. 3 for a special geometric form of a field raster element and a pupil raster element.

The shape of field raster element 20 is a rectangle in the embodiment shown in FIG. 3. The aspect ratio of field raster element 20 thus corresponds to the ratio of the arc length to the annular width of the required annular field in the reticle plane. As shown in FIG. 4, the annular field is shaped by the field lens. As shown in FIG. 3, without the field lens, a rectangular field results in the reticle plane.

In order to form annular field 30, as shown in FIG. 4, a grazing-incidence field mirror 32 is used. Under the constraint that the beam reflected by the reticle should not be directed back to the illumination system, one or two field mirrors 32 is (are) required, depending on the position of the entrance pupil of the objective.

If the principal rays run divergently into the objective that is not shown, then one field mirror 32 is sufficient, as shown in FIG. 4. In the case of principal rays entering the projection objective convergently, two field mirrors are required. The second field mirror must rotate the orientation of the ring. Such a configuration is shown in FIG. 5.

In the case of an illumination system in the EUV wavelength region, all components must be reflective ones.

Due to the high reflection losses for λ=10 nm-14 nm, it is advantageous that the number of reflections will be kept as small as possible.

In the construction of the reflective system, the mutual vignetting of the beams must be taken into consideration. This can occur due to construction of the system in a zigzag beam path or by operation with obscuration.

The process according to the invention for preparation of a design for an EUV illumination system with any illumination in a plane A will be described below as an example.

The definitions necessary for the process according to the invention are shown in FIG. 6.

First the beam path for the central pair of raster elements will be calculated.

In a first step, the size of the field raster elements 5 of the field raster element plate 7 will be determined. As indicated previously, the aspect ratio (x/y) results for rectangular raster elements from the form of the arc-shaped field in the reticle plane. The size of the field is determined by the illuminated area A of the intensity distribution of the arbitrary light source in the plane of the field raster elements and the number N of field raster elements on the raster element plate, which in turn is given by the number of secondary light sources. The number of secondary light sources in turn results from the uniformity of the pupil illumination as well as the intermixing.

The raster element surface A_(FRE) of a field raster element can be expressed as follows with x_(FRE), y_(FRE):

A_(FRE)=x_(FRE)·y_(FRE)=(x_(field)/y_(field))·y² _(FRE)

whereby x_(field), y_(field) describe the magnitude of the rectangle, which establishes the annular field. Further, the following is valid for the number N of field raster elements:

N=A/A_(FRE)=A/[y² _(FRE)·(x_(field)/y_(field))].

From this, there results for the size of the individual field raster element:

y_(FRE)={square root over (A/N[N·(x_(field)+L y_(field)+L )])}

and

x_(FRE)/y_(FRE)=x_(field)/y_(field)

The raster element size and the size of the rectangular field establish the imaging scale β_(FRE) of the raster element imaging and thus the ratio of the distances d₁ and d₂.

β_(FRE)=x_(field)/y_(field)=_(z2)/d₁

The pre-given structural length L for the illumination system and the raster element imaging scale β_(FRE) determine the absolute size of d₁ and d₂ and thus the position of the pupil raster element plate. The following is valid:

d₁=L/(1+β_(FRE))

d₂=d₁·β_(FRE)

Then, d₁ and d₂ determine in turn the radius of the pupil raster elements. The following is valid: $R_{FRE} = \frac{2 \cdot z_{1} \cdot z_{2}}{z_{1} + z_{2}}$

In order to image the pupil raster elements in the entrance pupil of the objective and to remodel the rectangular field into an arc-shaped field, one or more field lenses, preferably in toroidal form, are introduced between pupil raster element and reticle. By introducing the field mirrors the previously given structural length is increased, since, among other things, the mirrors must maintain minimum distances in order to avoid vignetting.

The positioning of the field raster elements depends on the intensity distribution in the plane of the field raster elements. The number N of field raster elements pre-given by the number of secondary light sources. The field raster elements are preferably arranged on the field raster element plate in such a way, that they cover the illuminated surface, without mutually vignetting.

In order to position the pupil raster elements, the raster pattern of the secondary light sources in the entrance pupil of the objective is given in advance. The secondary light sources are imaged counter to the light direction by the field lens. The aperture stop plane of this projection is in the reticle plane. The images of the secondary light sources give the (x, y, z) position of the pupil raster elements. The tilt and rotation angles remain as degrees of freedom for producing the light path between field and pupil raster elements.

If a pupil raster element is assigned to each field raster element in one configuration of the invention, then a light path is produced by tilting and rotating field and pupil raster elements. Thereby the light beams are deviated in such a way that the center rays all intersect the optical axis and reticle plane.

The assignment of field and pupil raster elements can be made freely. One possibility for arrangement would be to assign spatially adjacent raster elements to one another. Thereby the deflection angles will be minimal. Another possibility consists of homogenizing the intensity distribution in the pupil plane. This is made, for example, if the intensity distribution in the plane of the field raster elements is non-homogeneous. If field and pupil raster elements have similar positions, the pattern is transferred to the pupil illumination. The intensity can be homogenized by intermixing.

Advantageously the individual components of field raster element plate, pupil raster element plate, and field mirror of the illumination system are arranged in the beam path such that the beam course is as free of vignetting as possible. If such an arrangement has effects on the imaging, then the individual light channels and the field lenses must be re-optimized.

Illumination systems for EUV lithography can be obtained with the previously described design process for any desired illumination A with two normal-incidence and one to two grazing-incidence reflections. These systems have the following properties:

a homogeneous illumination, for example, of an arc-shaped field

a homogeneous and field-independent pupil illumination

the combining of exit pupil of the illumination system and entrance pupil of the objective

the adjustment of a pre-given structural length

the collection of the maximal possible waveguide value.

Arrangements of field raster elements and pupil raster elements will be described below for one form of embodiment of the invention with field and pupil raster element plates.

First, different arrangements of the field raster elements on the field raster element plate will be considered. The intensity distribution can be selected as desired.

The depicted examples are limited to simple geometric shapes, such as circle, rectangle, and the coupling of several circles or rectangles. The intensity distribution will be homogeneous within the illuminated region or slowly varying. The aperture distribution will be independent of the field.

In the case of circular illumination A of field raster element plate 100, field raster elements 102 may be arranged, for example, in columns and rows, as is shown in FIG. 7. Alternatively, the center points of the raster elements can be distributed uniformly by shifting the rows over the surface, as is shown in FIG. 8. The latter distribution is better adapted to a uniform distribution of the secondary light sources.

A rectangular illumination A is shown in FIG. 9. A shifting of the rows, as shown in FIG. 10, leads to a more uniform distribution of the secondary light sources. These are arranged, however, according to the extension of the field raster element plate within a rectangle. In order to be able to distribute the secondary light sources in the circular diaphragm plane, a double facetting is provided. The pupil raster elements sit at the site of the secondary light sources. In the case of rectangular illumination, it is necessary to tilt the field raster elements in order to produce a light path between field and pupil raster elements, such that the beams impinge on the pupil raster elements, which are arranged, for example within a circle, and which also must be tilted.

If the illumination A of field raster element plate 100 comprises several circles A1, A2, A3, A4, for example, by coupling of different beam paths of one or more sources, then with the same raster element size the intermixing is insufficient in the case of an arrangement of the raster elements in rows and columns according to FIG. 11. A more uniform illumination is obtained by shifting the raster element rows, as shown in FIG. 12.

FIGS. 13 and 14 show the distribution of field raster elements 102 in case of combined illumination from individual rectangles A1, A2, A3, A4.

Now, for example, arrangements of the pupil raster elements on the pupil raster element plate will be described.

Two points of view are to be considered in arranging the pupil raster elements:

1. For minimizing the tilt angle of field and pupil raster elements for production the light path, it is advantageous to maintain the arrangement of the field raster elements. This is particularly advantageous with an approximately circular illumination of the field raster element plate.

2. For homogenous filling of the pupil, the secondary light sources should be uniformly distributed in the entrance pupil of the objective. This can be achieved by providing a uniform raster pattern of secondary light sources in the entrance pupil of the objective. These are imaged counter to the direction of light with the field lens in the plane of the pupil raster elements, and determine in this way will the ideal site of the pupil raster elements.

If the field lens is free of distortion, then the distribution of the pupil raster elements corresponds to the distribution of the secondary light sources. However, since the field lens forms the arc-shaped field, distortion is purposely introduced. This does not involve rotation-symmetric cushion or semicircular distortion, but the bending of horizontal lines into arcs. The y-distance of the arcs remains constant in the ideal case. Real grazing-incidence field mirrors, however, also show an additional distortion in the y-direction. A raster 110 of secondary light sources 112 in the entrance pupil of the objective, which is also the exit pupil of the illumination system, is shown in FIG. 15, as it had been produced for distortion-free imaging. The arrangement of secondary light sources 112 corresponds precisely to the pre-given arrangement of the pupil raster elements.

If the field lenses are utilized for arc-shaped field-formation as in FIG. 16, then secondary light sources 112 lie on arc 114.

If the pupil raster elements of individual rows are placed on an arc, which compensate for the distortion, then one can place the secondary light sources again on a regular raster.

If the field lens also produces distortion in the y-direction, the pupil is distorted in the y-direction, as shown in FIG. 17.

The extent of the illuminated area onto field raster element plate is determined by the input illumination. The illumination of the pupil raster element plate is determined by the structural length and the aperture in the reticle plane.

As described above in detail, the two surfaces must be fine-tuned to one another by rotation and tilting of the field and pupil raster elements.

For illustration, the problems of this principle will be explained for refractive designs. The examples can be transferred directly, however, to reflective systems. Various configurations can be distinguished for a circular illumination of the field raster element plate, as shown below.

If a converging effect is introduced by tilting the field raster elements, and a divergent effect is introduced by tilting the pupil raster elements, then the beam cross section can be reduced. The tilt angles of the individual raster elements are determined by tracing the center rays for each pair of raster elements. The system acts like a telescope-system for the central rays, as shown in FIG. 18.

How far the field raster elements must be tilted depends on the convergence of the impinging beam. If the convergence is adapted to the reduction of the beam cross section, the field raster elements can be introduced on a planar substrate without a tilting angle.

A special case results if the convergence between field and pupil raster element plate corresponds to the aperture at the reticle, as shown in FIG. 19.

No divergent effect must be introduced by the pupil raster elements, so they can be utilized without tilting. If the light source also possesses a very small waveguide value and the secondary light sources are nearly point-like, the pupil raster elements can be completely dispensed with.

A magnification of the beam cross section is possible, if a diverging effect is introduced by tilting the field raster elements, and a collecting effect is introduced by tilting the pupil raster elements. For the central rays, the system operates as a retro-focus system, as shown in FIG. 20.

If the divergence of the impinging radiation corresponds to the beam divergence between field and pupil raster elements, then the field raster elements can be used without tilting.

Instead of the circular shape that has been described, rectangular or other shapes of illumination A of the field raster element plate are possible.

The arrangements shown in FIGS. 21A-56 described below show an embodiment of the invention for which undulators are used as synchrotron radiation light sources, without the invention being limited thereto.

The radiation of the undulator light source can be described as a point light source with strongly directed radiation, for example, the divergence both in the horizontal as well as the vertical direction is less than 10 mrads. Therefore, all illuminating systems described below as examples have only one mirror or one lens with raster elements, without the invention being limited thereto.

Undulator sources have in a predetermined plane in which a predetermined wavelength spectrum is irradiated, a beam divergence of <100 mrads, preferably <50 mrads. Therefore, collectors along the electron path for collecting the synchrotron radiation and bundling it, as described, for example, in U.S. Pat. No. 5,439,781 or U.S. Pat. No. 5,512,759 are not necessary for such sources.

Three possible configurations of an illumination system with an undulator source 200 and a mirror with raster elements will be described below.

Here:

Type A describes an embodiment, in which the individual raster elements of the first mirror are individual tilted planar facets.

Type B describes an embodiment, in which the individual raster elements are designed as facets in the convergence beam path.

Type C describes an embodiment, in which the raster elements of the first mirror form one structural unit with the means for beam broadening.

An illumination system according to type A in a refractive form is shown for the definition of the parameters in FIGS. 21A and 21B. In an embodiment according to type A, the means for beam broadening comprise a diverging lens 206 or diverging mirror, without being limited thereto.

The collecting effect for producing the secondary light sources is introduced by the collective mirror or collective lens 208 situated behind the diverging lens or diverging mirror 206. The means for beam broadening and the mirror or the lens with collecting effect form a so-called collector unit or a collecting system 210. If a mirror with raster elements is not present, the collective mirror would image source 200 in the diaphragm plane 212 of the illumination system. The secondary light source 216 is decomposed into a plurality of secondary light sources 218 by the mirror with raster elements 214 or the facetted mirror.

The raster elements 214 can be formed as planar facets, since the secondary light sources or light sources in this form of embodiment are imaged in the diaphragm plane by means of the collector unit.

The tilting angles of the planar facets are such that the center rays of each facet in the focal plane 220 coincidence on the optical axis 222. For the center rays, the facetted mirror or lens acts as a divergent mirror or lens. For illustration purposes, FIGS. 21A and 21B show the schematic structure based on a refractive, linearly constructed system. The facetted lens was removed in FIG. 21A. The secondary light source 216 lies in the diaphragm plane. The facetted lens 214 is inserted in FIG. 21B. The arrangement of individual prisms in the refractive presentation corresponds to the tilt of the facets.

An arrangement of the facetted mirror or lens in the convergent beam path according to type B as shown in FIGS. 22A and 22B is also possible. The collective mirror 208 is designed in such a way that the source 200 is imaged in the focal plane 220 of the illumination system, as shown in FIG. 22A. The collecting effect of facets 214 is then designed such that secondary light sources 218 are produced in the diaphragm plane 212, as shown in FIG. 22B.

In the embodiment of the invention according to type C, as shown in FIGS. 23A and 23B, the collective mirror or collective lens and the facetted mirror or lens are combined. In such a configuration, the collecting effect of the collector mirror is superimposes the facets as a tilt. The raster elements are shown as a superimposition of a prism and a collective lens in the schematic presentation in FIGS. 23A and 23B. In the reflective embodiment this is a tilted collective mirror 224.

The following formulas describe the imaging by the raster elements for the illumination arrangement according to types A-C: $\begin{matrix} {{NA}_{Ret} = \frac{\frac{{DU}_{BL}}{2}}{d_{5}}} & {\left. \Rightarrow{DU}_{BL} \right. = {2 \cdot d_{5} \cdot {NA}_{Ret}}} \\ {{\frac{{DU}_{BL}}{x_{Wabe}} \cdot \frac{d_{4} + d_{5}}{d_{5}}} = 4.0} & {\left. \Rightarrow x_{Wabe} \right. = {\frac{{DU}_{BL}}{4.0} \cdot \frac{d_{5}}{d_{4} + d_{5}}}} \\ {\beta_{Wabe} = {\frac{x_{Feld}}{x_{Wabe}} = \frac{d_{5}}{d_{4}}}} & {\left. \Rightarrow\beta_{Wabe} \right. = \frac{x_{Feld}}{x_{Wabe}}} \\ ~ & {\left. \Rightarrow d_{4} \right. = \frac{d_{5}}{\beta_{Wabe}}} \end{matrix}$

Wabe=raster element=FRE

DU=diameter

Feld=field

BL=diaphragm

The notations are:

d₅: measurement for the structural length

NA_(ret): aperture in the reticle plane. Number of raster elements in a raster element row=4 in the present form of embodiment. This is a measure for the number of secondary light sources, the uniformity of the field, and the uniform illumination of the pupil.

x_(field): x-extension of the field. DU_(BL): diameter of the diaphragm x_(raster element): x-extension, raster element y_(raster element): y-extension, raster element

If the illumination systems shown in FIGS. 21A to 23B being examples for refractive systems are designed for 13-nm EUV radiation, then these systems must be reflective systems for 13-nm radiation with as few reflections as possible due to the high reflection losses.

Beam-broadening means, which can be combined with a collective mirror into one collector unit are necessary for illuminating the mirror with raster elements when an undulator source is used as light source.

For an undulator source, the collector unit for 13-nm radiation can comprise a first grazing-incidence mirror or a scanning mirror, which broadens the radiation, and a second normal-incidence mirror, which collects the radiation.

In order to achieve an advantageous design in the case of 13-nm wavelength, due to the higher reflectivity, grazing-incidence mirrors (R≈80%) are preferred over normal-incidence mirrors (R≈65%).

Advantageously, the distance d₁ from the source to the first mirror should be at least d₁=3000 mm. In the case of such an embodiment, a free space of 2000 mm should be maintained between the first mirror and the remaining optics for the radiation-protection wall.

Alternatively to the arrangement with a first mirror in front of the radiation-protection wall and second mirror behind this wall, the first mirror can also be placed behind the radiation-protection wall with d₁>5000 mm. It can be designed as a grazing-incidence or normal-incidence mirror.

Advantageously the source irradiates in the horizontal direction.

The horizontally-situated reticle is illuminated at a principal beam angle of at most 20°, preferably 10°, and most preferably 5.43°.

A horizontal arrangement of reticle and wafer is necessary to avoid a bending of the optics in the gravitational field.

Advantageously, two grazing-incidence field mirrors are used for forming the field, in order to illuminate the reticle with correct annular orientation and to deflect the light separated from the illumination system into the objective.

Illumination systems according to types A and B are shown in FIG. 24 in schematic representation.

The system according to types A and B comprises a collector mirror 300, which is formed as a grazing-incidence toroidal mirror, which broadens the beam rays, and a normal-incidence collector mirror 302, which illuminates the mirror with raster elements 304 in a round manner and projects the light source either in the diaphragm plane (type A) or in the reticle plane (type B).

The reference number 304 designates the normal-incidence facetted mirror or mirror with raster elements. The field mirrors 306, 308 are formed as grazing-incidence field mirrors and form the field in the reticle plane.

The system parameters can be designed such that the optical axis is tilted only around the x-axis (α-tilt). The meridional plane remains the same. The distances between the mirrors are adapted to the boundary conditions of the source.

Such a type A system is described in detail below.

Individually tilted planar facets are used as raster elements. The undulator source was assumed to be a homogeneous surface radiator with a diameter of 1.0 mm and NA_(undulator)=0.001.

The facet rows 310 were arranged in a displaced manner relative to one another for the uniform distribution of the secondary light sources in the diaphragm plane, as shown in FIG. 25. The circle 312 in FIG. 25 shows the illumination of the mirror with raster elements, which are planar facets 314 by the broadened undulator source 200.

The arrangement of the mirrors relative to the global coordinate system of the source, of the type A illumination system shown in FIGS. 26 to 33 is compiled in the following Table 1.

TABLE 1 Arrangement of the mirrors for type A Component X [mm] Y [mm] Z [mm] α [°] β [°] γ [°] AOI [°] Source 0.000 0.000 0.000 0.000 0.000 0.000 0.000 — Divergent mirror 0.000 0.000 5000.000 80.000 0.000 0.000 80.000 g.i. Collecting mirror 0.000 1026.060 7819.078 −15.000 0.000 180.000 5.000 n.i. Mirror with field 0.000 878.459 6981.991 155.000 0.000 0.000 15.000 n.i. raster elements Diaphragm 0.000 1007.017 7135.200 −40.000 0.000 180.000 0.000 — Field minor 1 0.000 1906.231 8206.842 38.858 0.000 180.000 78.858 g.i. Field minor 2 0.000 2039.021 8276.605 16.573 0.000 0.000 78.857 g.i. Reticle 0.000 2287.899 8300.263 90.000 180.000 0.000 5.430 n.i. EP objective 0.000 68.158 8511.263 90.000 0.000 0.000 0.000 — X, Y, Z: origin of the coordinates of the components. α, β, γ: rotation angle of the surfaces. AOI: angle of incidence of the optical axis at the components g.i./n.i.: grazing incidence/normal incidence.

The z-axis of the reticle plane is at 90° relative to the z-axis of the source coordinate system.

The z-distance between source 200 and collector mirror 300 is 5000 mm in the system described below. For radiation-protection wall 316, a z-distance of 1900 mm is provided between collector mirror 300 and facetted mirror 304.

The reticle plane 318 lies 2287.9 mm above the source.

The design will now be described on the basis of FIGS. 26 to 33:

FIG. 26 shows the entire system up to the entrance pupil 320 of the objective in the yz-section including source 200 and divergent mirror 300, collective mirror 302, planar facetted mirror 304, field mirrors 306, 308, reticle plane 318 and entrance pupil 320 of the objective. The center beams are indicated for the central field raster elements (0,0) and the two outermost field raster elements. The beams intersect in reticle plane 318 and illuminate the entrance pupil 320 of the objective.

FIG. 27 shows an excerpt beginning with the collector mirror. The beam deflection of the edge beams with the tilted facets can be clearly seen.

FIG. 28 shows a fan of beams, which strikes the central raster element (0, 0) 322. The collector mirror produces the secondary light source 212 in the diaphragm plane. The field mirrors form the arc-shaped field and images the secondary light sources in the entrance pupil of the objective.

FIG. 29 shows the entire system with objective in yz-section, comprising: divergent mirror 300, collective mirror 302, planar mirror 304 with facets, field mirrors 306, 308, reticle plane 318 and 4-mirror projection objective 330. The beam bundle runs separated from the illumination system into the objective. Of course, other projection objectives are also possible, for example, 5-or 6-mirror objectives.

The illumination of the reticle with a 30° annular field (r=211 mm; −3.0 mm<Δr<+3.0 mm) in an contour-line representation of a system according to FIGS. 27 to 29 is shown in FIG. 30. Here, r is the ring radius, wherein a 30° segment from the ring is used.

An intensity section parallel to the y-axis at x=0.0, 15 mm, 30 mm, and 45 mm is shown in FIG. 31. Since the secondary light sources have only minimal extension, an ideal “hut” profile results. The width of the intensity profile increases at the edge of the field, due to the ring curvature and the non-optimal superimposition of the partial images. In order to keep the scanning energy constant, the maximal intensity decreases to the same extent. The integral scanning energy, i.e., the integration of the intensity along the scanning path is a decisive factor in the lithography process. As shown in FIG. 32, the integral scanning energy is nearly homogeneous in the present embodiment. It may be controlled by the design of the optical elements, such as field mirrors or field lenses.

FIG. 33 finally shows the pupil illumination in the center of the field. Intensity peaks 332 in the pupil illumination result corresponding to the raster element distribution. The maximal aperture amounts to NA_(ret)=0.025. The aperture of a partial pupil is negligibly small (NA_(partial pupil)=2E-6) corresponding to the small waveguide value of the undulator source.

However, a filling of the pupil results, when seen as an integral, due to the uniform distribution of the secondary light sources.

A form of embodiment of the invention according to type B with a facetted mirror in the convergent beam path is shown in FIGS. 34 to 41. The light source is assumed to be similar to the light source described in the embodiment according to FIGS. 26 to 33. The facets or raster elements are arranged as in FIG. 25 and are formed as collecting hollow facets, which are mounted on a planar support surface.

The arrangement of the mirrors relative to the overall coordinate system of the source is compiled in Table 2.

TABLE 2 Arrangement of the mirrors for type B Component X [mm] Y [mm] Z [mm] α [°] β [°] γ [°] AOI [°] Source 0.000 0.000 0.000 0.000 0.000 0.000 0.000 — Divergent mirror 0.000 0.000 5000.000 80.000 0.000 0.000 80.000 g.i. Collecting mirror 0.000 1026.060 7819.078 −15.000 0.000 180.000 5.000 n.i. Mirror with field 0.000 913.189 7178.953 155.000 0.000 0.000 15.000 n.i. raster elements Diaphragm 0.000 1041.747 7332.162 −40.000 0.000 180.000 0.000 — Field mirror 1 0.000 1917.187 8375.471 38.858 0.000 180.000 78.858 g.i. Field mirror 2 0.000 2049.977 8445.234 16.573 0.000 0.000 78.857 g.i. Reticle 0.000 2298.855 8468.892 90.000 180.000 0.000 5.430 n.i. EP objective 0.000 79.114 8679.892 90.000 0.000 0.000 0.000 — X, Y, Z: origin of the coordinates of the components. α, β, γ: rotation angle of the surfaces. AOI: angle of incidence of the optical axis at the components g.i./n.i.: grazing incidence/normal incidence.

The z-axis of the reticle plane is at 90° relative to the z-axis of the source coordinate system.

The z-distance between source 200 and collective mirror 302 is 5000 mm. For the radiation-protection wall (not shown), a z-distance between divergent mirror 300 and facetted mirror 304 of 2100 mm is provided.

The reticle plane 318 lies 2298.9 mm above the source.

FIG. 34 shows the entire system up to entrance pupil 320 of the objective in the yz-section, comprising: source 200, divergent mirror 300, convergent mirror 302, facetted mirror 304, field mirrors 306, 308, reticle plane 318, entrance pupil of objective 320. The center beams, which intersect in the reticle plane and illuminate the entrance pupil of the objective are indicated for the central field raster element (0,0) and the two outer field raster elements.

A section beginning at the divergent mirror 300 is shown in FIG. 35. The indicated rim rays are not influenced by facetted mirror 304, since this involves center beams and the facets are mounted on a planar support plate.

A fan of beams, which impinges the central raster element (0,0) is depicted in FIG. 36. The convergent effect of the raster element produces the secondary light source in the diaphragm plane. The field mirrors 306, 308 form the arc-shaped field and image the secondary light sources in the entrance pupil of the objective.

FIG. 37 shows the entire system with objective in the yz-section, comprising: divergent mirror 300, collective mirror 302, facetted mirror 304 in the convergent beam path, field mirrors 306, 308, reticle plane 318 and 4-mirror objective 330. The beams bundle run into the objective separated from the illumination system.

The illumination of the reticle with the 30° annular field (r=211 mm; −3.0 mm<Δr<+3.0 mm) is shown in FIG. 38 as a contour-line representation. Here, r is the ring radius, wherein a 30° segment from the ring is used.

FIG. 39 shows an intensity section parallel to the y-axis at x=0.0, 15 mm, 30 mm, and 45 mm. Since the secondary light sources have only minimal extension, an ideal “hut” profile is formed at least in the center of the field. The width of the intensity profile increases at the edge of the field, due to the ring curvature and the non-optimal superimposition of the partial images. The maximum intensity decreases with the broadening of the edges and the increased value of the half-width, so that the scanning energy remains constant.

As FIG. 40 shows, the integral scanning energy of the presently described embodiment is nearly homogeneous.

The pupil illumination in the center of the field is shown in FIG. 41.

Illumination systems of type C will be described below. The undulator light source is taken as before as the point-like light source.

The system according to type C comprises in a first embodiment according to type C1 a first grazing-incidence collector mirror 400, which deflects radiation downward. Mirror 400 broadens the beam and illuminates the facetted mirror 402, which reverses the radiation direction again towards the undulator source 200. In order to provide a solution that is free of vignetting, facetted mirror 402 also introduces a tilt of the optical axis around the y-axis, the so-called g tilt. Therefore the system axis runs beside the radiation-protection wall.

FIG. 42 shows the lateral view in the y-z-plane of such a system and FIG. 43 shows the top view in the x-z-plane.

The second embodiment, type C2, of a system according to type C is shown in FIG. 44.

In the system according to type C2, the grazing-incidence mirror 402 is replaced by a normal-incidence mirror. This has the consequence that the system axis again runs away from the undulator source after two reflections at mirror 402 and facetted mirror 404. The mirrors must then be tilted only around the x-axis, the so-called α-tilt. A tilt of the optical axis around the y-axis as in the case of type C1 is not necessary. Mirror 402 for beam broadening is found outside the source chamber in the case of type C2. Since the source radiation is polarized nearly linearly in the horizontal direction, the optical axis can also be deflected by larger angles without increased losses at the site of the beam-broadening mirror 402.

A system according to type C1 is shown once more in more detail in FIGS. 45 to 54.

The arrangement of the mirrors of this system shown in FIGS. 45 to 54 is compiled in Table 3.

TABLE 3 Arrangement of the mirrors for type C1 Component X [mm] Y [mm] Z [mm] α [°] β [°] γ [°] AOI [°] Source 0.000 0.000 0.000 0.000 0.000 0.000 0.000 — Divergent mirror 0.000 0.000 5000.000 −80.000 0.000 0.000 80.000 g.i. Mirror with field 0.000 −1026.060 7819.078 31.039 9.462 179.084 14.501 n.i. raster elements Diaphragm −63.666 −897.503 7679.723 222.692 −18.562 16.366 0.000 — Field mirror 1 −493.075 −30.412 6739.809 138.466 −18.880 −15.994 78.858 g.i. Field mirror 2 −531.728 146.641 6655.203 −18.117 203.471 −7.425 78.857 g.i. Reticle −539.593 345.744 6637.988 270.000 0.000 24.554 5.430 n.i. EP objective −627.274 −1873.997 6446.069 90.000 0.000 155.446 0.000 — X, Y, Z: origin of the coordinates of the components. α, β, γ: rotation angle of the surfaces. AOI: angle of incidence of the optical axis at the components g.i./n.i.: grazing incidence/normal incidence.

The z-axis of the reticle plane is at 90° relative to the z-axis of the source coordinate system.

The z-distance between source and divergent mirror amounts to 5000 mm. The back-running optical axis is rotated by the tilt of the facetted mirror around the x and y axes such that the objective does not cross the path of the illumination beam and the radiation-protection wall.

The facetted mirror lies −1026.1 mm beneath the source, and the reticle plane lies 345.79 mm above the source.

The design of type C1 given as an example will now be described in more detail on the basis of the figures.

FIG. 45 shows the entire system up to the entrance pupil of the objective in the y-z section, comprising: source 200, divergent mirror 402, facetted mirror 404 with convergent effect, field mirrors 406, 408, reticle plane 408, entrance pupil 410 of the objective. The center beams are shown for the central raster element (0,0) and the two outermost field raster elements. They intersect in the reticle plane and illuminate the entrance pupil of the objective.

FIG. 46 shows a section from the divergent mirror 400 in the x-z section. The depicted rim rays are deflected by the facetted mirror, such that they intersect in the reticle plane.

The segment from the divergent mirror 400 in the x-z section is shown in FIG. 47. The facetted mirror 402 with convergent effect tilts the optical axis away from the incoming beam bundle. Therefore, space is created for the objective and the radiation-protection wall.

A fan of beams, which impinges on central raster element (0,0) is depicted in FIG. 48. The convergent effect of the raster element produces the secondary light source in the diaphragm plane. Field mirrors 404, 406 form the annular field and image the secondary light source 412 in the entrance pupil 410.

FIG. 49 shows the entire system with objective in the y-z section, comprising:

divergent mirror 400, facetted mirror 402 with convergent effect, field mirrors 404, 406, reticle plane 410, 4-mirror objective 430. The beams run into the objective separated from the illumination system.

The entire system with objective is shown in the x-y section in FIG. 50. In this view, the separation of the objective and the illumination beam path between divergent mirror 400 and facetted mirror 402 is clearly seen.

FIG. 51 shows the illumination of the reticle with the 30° annular field (r=211 mm; −3.0 mm<Δr<+3.0 mm) in contour-line representation.

An intensity section parallel to the y-axis for x=0.0, 15 mm, 30 mm, and 45 mm is shown in FIG. 52.

As can be seen from FIG. 53, the integral scanning energy of the presently described embodiment is homogeneous.

The pupil illumination in the center of the field of a type C1 system is shown in FIG. 54.

It is not necessary that the diaphragm plane is accessible, so one may also operate with a virtual diaphragm plane. The light would then leave the mirror facets divergently. According to type B and type C, the facets would not be formed convergent, but rather divergent.

For type C the following is possible: The first collector mirror produces a virtual secondary light source 1000, as shown in FIG. 55A. The divergent beams are deflected by planar mirrors such that their center beams intersect the reticle plane at the optical axis. The tilted planar mirrors are shown as prisms in FIG. 55B. By this, a plurality of secondary light sources 1002 are produced in the virtual diaphragm plane.

The following formulas describe relationship of the system parameters according to FIGS. 55A and B: $\begin{matrix} {{NA}_{Ret} = \frac{\frac{{DU}_{BL}}{2}}{d_{4}}} & {\left. \Rightarrow{DU}_{BL} \right. = {2 \cdot d_{4} \cdot {NA}_{Ret}}} \\ {{\frac{{DU}_{BL}}{x_{Wabe}} \cdot \frac{d_{4} - {d_{3}}}{d_{4}}} = 4.0} & {\left. \Rightarrow x_{Wabe} \right. = {\frac{{DU}_{BL}}{4.0} \cdot \frac{d_{4}}{d_{4} - {d_{3}}}}} \\ {\beta_{Wabe} = {\frac{x_{Feld}}{x_{Wabe}} = \frac{d_{4}}{d_{3}}}} & {\left. \Rightarrow\beta_{Wabe} \right. = \frac{x_{Feld}}{x_{Wabe}}} \\ ~ & {\left. \Rightarrow{d_{3}} \right. = \frac{d_{4}}{\beta_{Wabe}}} \end{matrix}$

DU=diameter

BL=diaphragm

Wabe=raster element

Feld=field

wherein:

d₄: measurement for the structural length

NA_(ret): aperture in the reticle plane.

Number of raster elements in a raster element cell=4. This provides for the number of secondary light sources, the uniformity the field, and the uniform illumination of the pupil.

x_(field): x-extension of the field

It is clear from the schematic representation according to FIGS. 55 A-B that the distances d₂ and d₃ are approximately of equal magnitude for the undulator source with NA_(source)=0.001. Together with a structural length that can realized, this will require in practical terms a normal-incidence collector mirror.

In order to smear the sharp intensity peaks as shown, for example, in FIG. 54 in the pupil and to effectively increase the waveguide value, the last field mirror can be designed as a moving mirror, a so-called wobbling field mirror, in all forms of embodiment of the invention. The movement of a wobbling field mirror primarily changes the aperture angle and has little influence on the field position.

In addition to a movement of the entire mirror, a periodic surface change of the last mirror is also conceivable in order to achieve this smearing of the sharp intensity peaks in the pupil.

In order to reduce the raster element aspect ratio, the use of astigmatic facets is possible. By this, the diaphragm plane is split into sagittal and tangential diaphragm planes. The aspherical field mirrors image these two planes in the entrance pupil of the objective.

The illumination distribution in the reticle plane can be influenced by the design of the field lens. For example, a uniform scanning energy can be achieved in this way.

For the control of the scanning uniformity, in another configuration of the invention, one of the two field mirrors can be configured as an active mirror.

The azimuthal distortion can be controlled by several actuator rows, which run in the y-direction. 

What is claimed is:
 1. An illumination system comprising: a primary light source; a device for producing secondary light sources having at least a first mirror or lens, which is divided into raster elements; and one or more first optical elements, being arranged between said device and an image plane of the illumination system, wherein said first optical elements image said secondary light sources in an exit pupil of the illumination system; wherein said primary light source emits a beam with wavelengths ≦193 nm in a first plane, and wherein said beam has a first beam divergence smaller than 5 mrads in a second plane perpendicular to said first plane.
 2. The illumination system according to claim 1, wherein said beam comprises a second beam divergence <100 mrads in said first plane.
 3. The illumination system according to claim 1, further comprising a collector unit having one or more second optical elements, said second optical elements for increasing said first beam divergence.
 4. The illumination system according to claim 3, wherein said second optical elements comprise a second mirror or lens, said second mirror or lens having a negative optical power to increase said first beam divergence.
 5. The illumination system according to claim 4, wherein said second mirror or lens is a grazing-incidence mirror.
 6. The illumination system according to claim 3, wherein said second optical elements comprise a scanning mirror.
 7. The illumination system according to claim 3, wherein said collector unit comprises one or more third optical elements, said third optical elements for collecting said beam.
 8. The illumination system according to claim 7, wherein said third optical elements comprise a second mirror or lens, said second mirror or lens having a positive optical power.
 9. The illumination system according to claim 3, wherein said collector unit transforms said beam to produce a circular illumination at said first mirror or lens.
 10. The illumination system according to claim 3, wherein said collector unit images said primary light source in a diaphragm plane.
 11. The illumination system according to claim 3, wherein said collector unit images said primary light source in said image plane.
 12. The illumination system according to claim 7, wherein said third optical elements comprise said first mirror or lens, and wherein said raster elements are arranged to collect said beam.
 13. The illumination system according to claim 12, wherein said raster elements has a center ray, and wherein said raster elements are arranged on a surface of said first mirror or lens such that at least two of said center rays intersect each other in said image plane.
 14. The illumination system according to claim 12, wherein said raster elements have positive optical power, such that said secondary light sources are formed in a diaphragm plane.
 15. The illumination system according to claim 1, wherein said beam has a second beam divergence <5 mrads.
 16. The illumination system according to claim 15, further comprising a collector unit having one or more second optical elements, said second optical elements for increasing said first and second beam divergences.
 17. The illumination system according to claim 1, wherein said wavelengths are in a range of about 10 nm to 15 nm.
 18. The illumination system according to claim 1, wherein said primary light source is a synchrotron radiation source.
 19. The illumination system according to claim 1, wherein said raster elements of said first mirror or lens produce said secondary light sources.
 20. The illumination system according to claim 1, wherein said raster elements are arranged such that images of said raster elements are superimposed, at least partially, in said image plane.
 21. The illumination system according to claim 1, wherein said raster elements of said first mirror or lens are arranged such that said exit pupil is homogeneously illuminated.
 22. The illumination system according to claim 1, wherein said raster elements are formed as planar facets.
 23. The illumination system according to claim 22, wherein each of said planar facets has a center ray, and wherein said planar facets are arranged on a surface of said first mirror or lens such that at least two of said center rays intersect each other in said image plane.
 24. The illumination system according to claim 1, wherein said raster elements have positive optical power such that said secondary light sources are formed in a diaphragm plane.
 25. The illumination system according to claim 1, further comprising a second mirror or lens with raster elements, wherein said first mirror or lens comprises a plurality of field raster elements, and wherein said second mirror or lens comprises a plurality of pupil raster elements.
 26. The illumination system according to claim 25, wherein said pupil raster elements are located at or nearby a site of said secondary light sources.
 27. The illumination system according to claim 25, wherein each of said field raster elements corresponds to one of said pupil raster elements, and wherein each of said pupil raster elements images its corresponding field raster element in said image plane.
 28. The illumination system according to claim 25, wherein said field raster elements and said pupil raster elements are arranged to provide a light path between a pair of said field raster elements and said pupil raster elements.
 29. The illumination system according to claim 1, wherein said raster elements have an anamorphotic power for reducing an aspect ratio of said raster elements.
 30. An projection exposure apparatus for microlithography comprising: an illumination system according to claim 1; a mask on a first carrier system, said mask being positioned in said image plane of the illumination system; a projection objective with an entrance pupil, said entrance pupil being in a same plane as said exit pupil of the illumination system; and a light-sensitive object on a carrier system, wherein said mask is imaged by said projection objective onto said light-sensitive object.
 31. A process for producing microelectronic components, particularly semiconductor microdevices, comprising the step of utilizing a projection exposure apparatus according to claim
 30. 